摘要
提出了根据变形测量和形貌测量的关系测量物体三维形貌的方法。利用电子散斑干涉(ESPI)测量物体面形时,物体偏转微小角度会引入附加的物面高度差,从而引入载波条纹。分析了物面偏转角度和附加高度差之间的关系,得出了物面相位和物面高度之间的映射关系。物面的相位由傅里叶变换法求得。对球冠面形进行了测量,实验表明,在物面上产生干涉载波条纹,进而测量物面面形,具有灵敏度高的优点。
A method of shape measurement based on the relationship between displacement measurement and shape measurement is presented. When the shape of an object is measured by using electronic speckle pattern interferometry （ESPI）, the test object tilting with a small angle will introduce an additional height difference and produce a carrier pattern. The relationship between the tilting angle and the additional height difference is analyzed. Then the relationship between the phase of the test object and the height of object＇s surface is obtained. The phase of the test object can be extracted by Fourier transform, A surface shape of a small ball is tested by using this method. The results indicate that the sensitivity of this method is high when the carrier pattern on an object surface is produced and object surface shape is measued.
出处
《激光与光电子学进展》
CSCD
北大核心
2011年第5期79-82,共4页
Laser & Optoelectronics Progress
基金
山东省自然科学基金(Y2008G18)资助课题
关键词
测量
电子散斑干涉
面形测量
载波
傅里叶变换
meascnement
electronic speckle pattern interferometry
shape measurement
carrier pattern
Fourier transform
