数字微镜器件用于并行共焦测量的再研究

Re-Studies on Parallel Confocal Measurement System with Digital Micromirror Device

数字微镜器件(DMD)可以控制其中每个微镜的偏转状态,相对于其他光分束器件,它可以构建出点光源大小可变、间距可调的柔性阵列光源。在前期研究的基础上,理论上推导出该阵列光源可以用于并行共焦测量,改进了测量光路,并结合实际使用找到了合适的阵列光源参数,获知了并行共焦测量系统的纵向分辨率与点光源大小的关系,最终通过对实物的测量较完善地阐述了基于DMD的并行共焦测量系统。

Compared with other beam splitting devices,digital micromirror device（DMD） can control the deflection state of every micromirror,which can construct the flexible array light source with tunable size of point light source and distance.Based on the previous researches,the theoretical model of DMD is deduced and the optical path of measurement is improved.Combined with actual usage,the suitable parameters of array light source are found.The relation between longitudinal resolution of parallel confocal microscope and the size of point light source is gotten.Finally,the parallel confocal measurement system based on DMD is proved by experiments.