摘要
为了研究常用间隔层材料的软X射线多层膜的材料设计,利用Lawrence-Livermore国家实验室提供的软X射线多层膜设计程序进行模拟计算,得到了软X射线波段内的具有高反射率的膜系。结果表明,Mo在相当大的波段范围内具有良好的光学特性;除了在12.44nm是首选膜系外(除4.36nm外),其它波长都有较高的反射率;U作为吸收层材料,在相当大的波段范围内,与其它间隔层材料配对的多层膜也具有较高的反射率。这对多层膜膜系的材料选择有一定的指导意义。
To study the material commonly used in the interval of soft X-ray multilayer, soft X-ray muhilayer with high reflectivity were designed with the special design program prepared by the Lawrenee-Livermore National Laboratory. The results show that Molybdenum has good optical property in a wide waveband. Besides at optimum wavelength of 12.44nm, molybdenum has high reflectivity at other wavelengths except 4.36nm. Multilayer consisting of uranium and other spacing layer material, with uranium as an absorption layer, also has higher reflectivity in a large wavelength range. The results are helpful for selection of multilayer material.
出处
《激光技术》
CAS
CSCD
北大核心
2011年第3期415-417,共3页
Laser Technology
基金
国家八六三高技术研究发展计划资助项目
西华师范大学博士科研启动基金资助项目(10B014)
关键词
薄膜
软X射线多层膜
多层膜设计
间隔层材料
thin films
soft X-ray multilayer
multilayer design
spacing layer material
