碳纳米管气敏传感器的制备与性能研究

Research on Fabrication and Properties of Carbon Nanotube Gas Sensor

本文采用传统的光刻工艺、丝网印刷技术和烧结工艺在ITO透明导电薄膜上制备出电容式的碳纳米管(CNT)膜气敏传感器,探讨扫描电压、工作频率和各种工艺参数对其性能的影响。光学显微镜测试表明,丝网印刷的CNT膜表面平整、分布均匀。扫描电镜表征显示,在大气中300℃烧结能促使有机粘合剂充分地分解和蒸发,在CNT膜中留下能有效提高气体吸附面积的丰富间隙。半导体特性分析仪分析表明,CNT膜气敏传感器经300℃烧结后在室温条件下,电容和电导对乙醇的灵敏度分别为198%和197%。

In this paper,carbon nanotube（CNT） film gas sensors were fabricated by conventional lithography,screen-printing and sintering processes on ITO transparent conductive film.And the influences of scanning voltage,operating frequency and various process parameters on the properties of gas sensors were investigated.Optical microscope tests show that the surface of screen-printing CNT film is smooth and uniform.The image of scanning electron microscopy exhibits that the organic binder on the surface of screen-printing CNT film is fully decomposed and vaporized when sintered at 300℃,and abundant gaps improving effectively gas absorption area are obtained.The analysis of semiconductor property analyzer indicates that at room temperature,the corresponding sensitivities of capacitance and conductance of the CNT film gas sensors after sintered at 300℃ in ethanol atmosphere are 199% and 197%,respectively.