振弦式硅微机械陀螺

Vibrating Strings Silicon Micro-machined Gyro

提出了一种新的振弦式硅微机械陀螺的设计方案,这一陀螺的制作采用硅微机械工艺。一方面,陀螺驱动模块采用电磁力驱动,这样能极大地提高驱动幅度;另一方面,陀螺检测模块采用差分的双振弦方式,从而提高了检测精度。通过陀螺检测模块的振弦将角速度的变化直接转换成输出信号的频率变化,这样能够极大地提高信号的抗干扰能力。理论分析表明,这一陀螺具有测量范围宽、测量精度高、抗干扰能力强、低成本且不需要真空封装等优点,可以广泛应用于自动化和惯性导航等众多领域。

The author puts forward a design of new gyro. The gyro can be fabricated by bulk micro-machined processwith SOI silicon. On one hand, the gyro adopts electromagnetic force driving, so the driving amplitude can be verylarge and it can improve the gyro＇s sensitivity. On the other hand, the gyro adopts two vibrating strings to detect thesignal. The vibrating strings transfer the Coriolis force directly to the frequency changes of the signal. So theanti-interference capacity of the signal can be improved highly. Theoretical analysis indicates that this gyro has thecharacteristics of high bandwidth, wide range, high resolution, low cost and without vacuum packaging. It can bewidely used in automatic and inertial guidance.