双面抛光机气动加载的建模与仿真

The Modeling and Simulation of Pneumatic Loading System of Double-sided Polishing Machine

双面抛光机广泛用于硅片、蓝宝石、陶瓷、磁性材料、电子器材的表面超光滑无损伤的平整加工。气动加载系统是双面抛光机实现精密抛光非常关键的部分。抛光压力加载精度的高低直接决定了抛光机性能的好坏。本文利用法国AMESim软件对气动加载系统进行建模,通过仿真得出了一组最佳PID参数,满足了系统要求,并使系统性能得到提高。

Double-sided polishing machine is widely used to high precision dimension,high accuracy surface,and ultra-smooth surface without damaging layer for some hard and brittle workpiec such as silicon wafer,sapphire,ceramic,magnetic substrates,electronic materials,etc.Pneumatic loading system is the very crucial part of the double-sided polishing machine.The polishing machine＇s performances are directly determined by the loading precision.This paper established the modeling and simulation of pneumatic load system by AMESim and then gave optimization PID parameters to improve system performance,and the cure of load capacity.