测试氦质谱检漏仪线性的一种新方法

A New Method for Testing Linear Performance of Helium Mass Spectrometer Leaker Detector

根据氦质谱检漏仪中机械泵的抽速在某真空范围内恒定的特性,首次提出了一种考察检漏仪线性能力的新方法,并通过试验验证了该方法的合理性。该方法通过调整检漏仪的入口压力来改变进入检漏仪的气体流量,对于氦气浓度恒定的混合气体则可以改变进入检漏仪中的氦气流量,从而改变检漏仪的输出读数;通过分析检漏仪的入口压力与最终输出读数间的关系考察检漏仪的线性能力。结果表明:该方法简便、成本低廉,测试范围涵盖了工程常用的漏率范围。

Based on the characteristic that pumping speed of the mechanical pump was constant within a certain pressure range,a new method for testing the linear performance of the leak detector was proposed.Meanwhile,its rationality was also proved through tests.The gas flow in the leak detector was changed by adjusting the inlet pressure of the leak detector.When the helium concentration in mixed gas was constant,the helium gas flow in the leak detector was also changed.So the output of the leak detector was changed.By changing the relationship between the inlet pressure and the output of the leak detector,the linear performance of the leak detector was obtained.The results show that this method is simple,convenient and inexpensive.