碱/酸两步催化法制备耐候性SiO_2增透膜的研究

Preparation and Characterization of Environment-Resistant Silica Antireflective Coating by Base/Acid Two-Step Catalyzed Sol-Gel Process

以正硅酸乙酯(TEOS)为先驱体,采用碱/酸两步催化溶胶-凝胶法制备出一种兼具碱催化增透膜的高透过率和酸催化增透膜的良好耐摩擦性能的优点的SiO2增透膜。对酸碱催化SiO2相对比例及酸催化时水含量的系统研究表明,当酸催化SiO2的含量为50%时,增透膜综合性能最好,即具有高透过率和高耐摩擦性;当nH2O/nHCl=1∶0.0010时,增透膜的透过率最高。碱/酸两步催化法制备的增透膜与水的接触角仅为11.3°,本文进一步用六甲基二硅氧烷(HMDS)对增透膜表面进行了修饰,修饰后增透膜的接触角提高至52.5°,增透膜的疏水性及环境稳定性得到较大的提高。

Antireflective（AR） coatings with high transmittance and abrasion-resistance were prepared by a two-step base/acid catalyzed sol-gel process using tetraethylorthosilicate（TEOS） as precursor.It was found that addition of 50% acid-catalyzed SiO2 in the sol afforded the AR coatings relatively high transmittance and enhanced abrasion-resistance.It provided the AR coating with highest transmittance while the mole ratio of nH2O/nHCI was 1∶0.001 0.The water contact angle of base/acid two-step catalyzed AR coating was 11.3°,in this work,hexamethyldisiloxane（HMDS） was further used to modify the hydrophobicity of AR coatings.After HMDS treatment,the hydroxyl groups of AR coating were replaced by-OSi（CH3）3,which greatly increases the hydrophobicity of the coating,affording HMDS modified AR coating excellent environment resistance.