光刻伺服盘伺服编码刻写装置研究

Study of Servo Decode Written Device Using in Etched Servo Disk

本文主要介绍伺服编码刻写装置的系统结构、伺服编码及试验结果,测试和检查方法.实验结果表明,所研究的刻写装置适合光刻伺服盘伺服编码刻写要求,为光刻伺服盘进一步实用化打下了基础.

The stupy of etched servo disk has beenfinished by authors[1].The paper describes thedesign of servo decode and the researchingresults to servo decode written device.A lotof experiments have demonstrated that thewritten device is satisfied for the servo deco-de written demand of the etched servo disk,and it is hopeful that the etched servo diskwould be used in practical drive disk.