同时测量物体五维几何偏差的新方法

A New Method for Simultaneous Measuring Five dimensional Geometric Errors of the Object

详细分析了基于激光全息技术、激光准直技术、激光光束漂移补偿技术和磁光调制补偿技术的综合运用，以单一激光束为基准，同时测量物体五维偏差的基本原理。通过标定和实验测量，在激光光源距测量靶标１ ｍ 时，该测量系统σ精度为：线位移＜ ２ μｍ ，角位移＜ ４″。

An energy center of a single laser beam is set as a datum line, through adoption of hololens beam splitting method, and composite utilization of laser alignment technique, laser drift compensation technique and magneto optic modulation and compensation technique, a new method for simultaneous measuring five dimensional geometric errors of the object is described. Through actual measurement, the repeatability accuracy of the current system is to be 2?μm for linear displacement measurement errors and better than 4″ for angular measurement errors with a 1?m offset between laser and a photoelectric receiving target.