溶胶-凝胶法制备Sm^(3+)掺杂TiO_2薄膜

PREPARATION OF Sm^(3+) DOPED TiO_2 FILM BY SOL-GEL METHOD

以钛酸丁酯、氯化钐和乙醇为主要原料,采用溶胶-凝胶法制备出Sm3+掺杂的TiO2薄膜.考察了薄膜煅烧温度、前驱体pH值、Sm3+掺杂量对薄膜制备的影响,并采用X射线衍射仪、扫描电子显微镜对所制备薄膜的物相组成,显微结构进行了表征.结果表明:煅烧温度为550℃可使薄膜充分晶化,前驱体pH=3.0时成膜性最好,Sm3+掺杂改变了TiO2薄膜的晶格尺寸,且改善了薄膜表面气泡的大小和分布,Sm3+的最佳掺杂量为0.5%mol.

The Sm3＋ doped TiO2 film were prepared from Ti（OC4H9）4,C2H5OH and SmCl3 by sol-gel method.The effect of sintering temperature,precursor pH value and the doping amount of Sm3＋ on preparation were investigated.The film were characterized by XRD and SEM.The result show that the anatase-TiO2 film were obtained from 550 ℃.When the precursor pH=3.0 is fit for film forming.Sm3＋ changed the lattice size of TiO2 and the distribution of stoma on the film.The best doping amount is 0.5%mol.