摘要
给出一种可用于纳米精度测量的二次混频测相技术，着重设计了其中的频率合成器．采用MAX038组成频率跟踪振荡源，理论分析和实验结果表明，信号频率在20MHz以内测相分辨率可达0．1°，且长时间工作稳定，满足超精密测量的要求．
A simple phase measurement technique of high resolution, the secondary mixing, is presented. The design of frequency synthesizer using MAX038 to track input frequency is also given in this paper. Theoretical analysis and experimental results zhow that it can be used in nanometer. measurement to obtain 0. 1° phase resolution.
出处
《深圳大学学报（理工版）》
EI
CAS
1999年第2期50-53,共4页
Journal of Shenzhen University(Science and Engineering)
关键词
纳米测量
二次混频
频率跟踪
相位测量
干涉仪
nanometer measurement
secondary mixing
frequency tracking
phase measurement
