静电放电防护器件研究综述

Review of Experiment Investigation on ESD Protection Devices

静电放电（Electrostatic Discharge,ESD）严重影响当今微电子器件的可靠性,使用静电放电防护器件是提高电路ESD可靠性的一种重要途径。随着微电子技术的高速发展,出现了多种新型防护器件。文章介绍了当前最常用的几种静电放电防护器件（瞬态电压抑制管（TVS）、可控硅整流器件（SCR）、NMOS器件）的工作机理及其国内外研究现状和发展趋势。开展静电放电防护器件研究,对提高静电放电防护器件性能及设计新型静电放电防护器件有着重要指导作用。

The reliability of the micro-electronic devices is affected greatly by the ESD,so the ESD protection devices are often used when designing the circuit.In this paper,the working mechanism and the development of TVS,SCR and NMOS devices are analyzed.It is important to study the ESD protection devices and it would be a guideline both to increase the capability of the ESD protection devices and to design new devices.