扭摆式硅微加速度计的优化设计

Optimum Design of Pendulous Micromachined Silicon Accelerometer

文中介绍了扭摆式硅微加速度计的结构原理和对其进行最大灵敏度优化设计的方法。计算结果表明，对硅微加速度计的结构参数进行优化，可以最大限度地提高传感器的性能。

The structure,principle and the maximum sensitivity optimum design method of pendulous micromachined silicon accelerometer(PMSA)are introduced in this paper.The caculating results show that the performance of PMSA can greatly improve via optimizing its parameters.