摘要
以像散法的测微原理为依据，对ＣＤ光学头的检测系统进行研究改造，构建了一维测微系统。获得０－０７μｍ 的测量分辨率，１００ｋＨｚ 的频率响应。同时具有体积小，成本低等优点。具有广阔的应用前景。
This paper presents a new non contact displacement measuring instrument based on astigmatic focus error detection measuring princile.Resolution and frequency of the instrument is obtained by the results of experiment.The measurment system is also characterized by simple structure,low cost and wide application fields.
出处
《仪表技术与传感器》
CSCD
北大核心
1999年第11期11-12,15,共3页
Instrument Technique and Sensor
基金
上海市自然科学基金
关键词
非接触测量
位移测量
像散法
CD光学头
Non contact Measurement,Displacement Measurement,Astigmatic Focus Error Detection,CD Optical Head
