高衍射效率全息光栅的制作与复制工艺研究

The Fabrication and Replication of Holographic Grating with High Diffraction Efficiency

本文根据正性光致抗蚀的感光显影特性，推导出了全息光栅沟槽深度公式，分析了影响光栅糟型结构的因素，建立了光栅沟槽模型。并根据论理论制作出了衍射效率高达６５％的 ２４００线／毫米的全息平面反射光栅。本文还介绍了全息光栅复制技术，解决了高质量光栅昂贵的生产成本和大批量生产问题。

In this paper a groove-depth formula of holographic grating is derived according to the exposure and development characteristics of positive photoresist, then the typical shapes of groove are discussed. Using this theory a 2400lines/mm reflecting plane holographic grating, whose diffraction efficiency in the UV region is about 65% was fabricated, and the replica of some holographic gratings, is made by the replication technology of grating.