过滤式阴极电弧沉积类金刚石薄膜的碳弧稳定性研究

Research on Arc Stability of Diamond -Like Carbon by Filtered Vacuum Arc Deposition

介绍自行研制的一套过滤式阴极电弧沉积设备，并以石墨作为靶材进行类金刚石薄膜的沉积研究。碳弧本身的惰性限制了电弧的稳定性。电弧电压、磁场等对电弧的稳定性有很大的作用。试验得到表面光滑的类金刚石薄膜。

A kind of filtered vacuum arc deposition system is home-built in the laboratory, and graphite is used as target material for the diamond-like carbon thin film deposition. Carbon arc is not easy to move thus the arc stability is difficult to control. Arc voltage, magnetic fields of spacer and filter tortus have important influence on the arc stability.The experiments show that diamond-like carbon thin film is achieved by these parameters and Raman spectrum and SEM have proven these results.