Sliding mode control for nanopositioning platforms
Sliding mode control for nanopositioning platforms
出处
《材料科学与工程（中英文版）》
2009年第6期1-8,共8页
Journal of Materials Science and Engineering
参考文献30
-
1TIAN Y., Shirinzadeh B., ZHANG D., et al. Development and dynamic modeling of a flexure-based Scott-Russell mechanism for nano-manipulation. SienceDirect online. Journal of Mechanical Systems and Signal Processing, 2009, 23: 957-978.
-
2YAO Q., DONG J. and Ferreira P. M.. Design, analysis, fabrication and testing of a parallel-kinematic micropositioning XY stage. Int. J. of Machine Tools & Manufacture, 2007, 47(6): 946-961.
-
3XU W. and King T.. Flexure hinges for piezoactuator displacement amplifiers: Flexibility, accuracy, and stress considerations. Precision Engineering, 1996, 19(1): 4-10.
-
4Tseng Y. T. and LIU J. H.. High-speed and precise positioning of an X-Y table. Control Engineering Practice, 2003, 11(4): 357-365.
-
5Otsuka J.. Nanometer level positioning using three kinds of lead screws. Nanotechnology, 1992, 3(1): 29-36.
-
6GAO W., Dejima S., Yanai H., et al. A surface motor-driven planar motion stage integrated with an XYθz surface encoder for precision positioning. Precision Engineering, 2004, 28(3): 329-337.
-
7Tomita Y., Makino K., Suqimine M., et al. High-response X-Y stage system driven by in parallel linear motors. CIRPAnnals-Manufacturing Technology, 1996, 45(1): 359-362.
-
8LIU Y. T., Fung R. F., and WANG C. C.. Precision position control using combined piezo-VCM actuators. Precision Engineering, 2005, 29(4): 411-422.
-
9LIU Y. T., Fung R. F., and WANG C. C.. Application of the nonlinear, double-dynamic taguchi method to the precision positioning device using combined piezo-VCM actuator. IEEE Trans. on Ultrasonics, Ferroelectrics, and Frequency Control, 2007, 54(2): 240-250.
-
10Alici G. and Shirinzadeh B.. Kinematics and stiffness analyses of a flexure-jointed planar micromanipulation system for a decoupled compliant motion. Proc. Int. Conf. on Intelligent Robots and Systems, 2003, 3: 3282-3287.
-
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-
2宋召青,龙玉峰,孙俊平.迟滞非线性系统的建模与控制研究综述[J].海军航空工程学院学报,2014,29(6):528-534. 被引量：4
-
3刘向东,修春波,刘承,李黎.基于混沌神经网络的压电陶瓷迟滞模型[J].北京理工大学学报,2006,26(2):135-138. 被引量：6
-
4李春涛,谭永红.基于状态观测器的迟滞非线性系统输出反馈控制[J].控制与决策,2004,19(9):967-972. 被引量：4
-
5QUEENSGATE Queensgate推出双传感器技术[J].现代制造,2013(3):27-27.
-
6李春涛,谭永红.迟滞非线性系统的建模与控制[J].控制理论与应用,2005,22(2):281-287. 被引量：16
-
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-
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-
9张红梅,张国山.Adaptive Backstepping Sliding Mode Control for Nonlinear Systems with Input Saturation[J].Transactions of Tianjin University,2012,18(1):46-51. 被引量：2
-
10毛剑琴,丁海山.率相关迟滞非线性系统的智能化建模与控制[J].中国科学（F辑:信息科学）,2009,39(3):289-304. 被引量：5
