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Gate leakage current of a double gate n-MOS on (111) silicon-a quantum mechanical study

Gate leakage current of a double gate n-MOS on (111) silicon-a quantum mechanical study
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出处 《材料科学与工程(中英文版)》 2008年第10期1-5,共5页 Journal of Materials Science and Engineering
关键词 量子力学效应 MOS结构 硅表面 漏电流 POISSON方程 双门 晶体取向 机身厚度 self-consistent solution gate leakage current
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参考文献10

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