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金刚石薄膜的新合成方法 被引量:2

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摘要 用不太新型的电子显微镜观察金属薄膜的时候,经常碰到样品上带有黑色污点、使对比度下降这种麻烦事,这种现象被认为是从扩散泵里出来的油蒸气粘附在样品表面上,再由电子束分解形成了碳膜。有时也想,碰巧的话,这碳膜不就成为金刚石了吗? 那已是十多年前的事了,苏联和美国都开始试验用低压合成金刚石。但是。
出处 《微细加工技术》 1990年第2期41-46,共6页 Microfabrication Technology
关键词 金刚石 薄膜 合成
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同被引文献18

  • 1J.Karner,M.Pedrazzini,High current d.c.arc(HCDCA)technique for diamond deposition.[J].Diamond and Related Materials,1996,5:217-220.
  • 2John V B,John P D.Chemical vapour deposited diamond films as protective coatings on titanium alloys[J].Diamond and Related Materials,1994,3:295.
  • 3Sato T,Hosokawa Y.Plasma carbonitriding of cemented carbide substrate as an effective pretreatment process for diamond[J].CVD Surface and Coating Technology,1999,112:189.
  • 4Nesladek M,Vandierendonck K,Quaeyhaegens C et al.The surface properties on both sides of the diamond film[J].Thin Solid Film,1995,270:184.
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  • 6Kruger J K,et al.Hypersonic properties of nan-and microstructured CVDdiamond[J].Diamond and related Materials,2000,9:123-128.
  • 7Simon S Proffitt,et al.Growth of nanocrystalline diamond films for low field electron emission[J].Diamond and Related Materials,1999:8 768-771.
  • 8Yugo S,Kanai T,Kimura T,and Muto T.Generation of diamond nuclei by electric field in plasma chemical vapor deposition[J].Applied Physics Letters.1991,58(10):1036-1038.
  • 9Khomich A V,Perov P I,et al.Influence of post-deposition annealing and oxidation on structure related materials[C].Third International Conference.Washington:NIST Technical Publication,1995,597.
  • 10Gouzman I,et al.Nanosize diamond formation promoted by direct current glow discharge process:Synchrotron radiation and high resolution electron microscopy studies[J].Applied Physics Letters,1998,72:2517-2519.

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