扫描电镜—能谱分析的一种新方法

A NEW METHOD OF SCAN ELECTRONIC MICROSCOPEENERGY SPECTRUM ANALYSIS

在扫描电镜一能谱分析中附加一落靶进行X射线荧光分析有很高的峰背比（即有很高的探测灵敏度），能检测样品中存在的微量元素，并减低对样品的辐射损伤。

Attaching a thin target to the X - ray fluorescent analysis in the scan electronic thecroscope - energy spectrum analysis has very high crest - back ratio, possessing very high detecting sensihtity, can detect the trace elements existing withen the samples, and reduce the radiation damage.