摘要
对以玻璃为基材的微透镜阵列的制作工艺进行了研究,得出了影响微透镜阵列制作的三个主要因素:玻璃组分、腐蚀方法以及抗蚀掩模层材料。并通过实验详细分析了这三者对实验结果的影响。根据分析结果,选择合适的材料和工艺方法,获得了效果较好的玻璃微透镜阵列,为玻璃微透镜阵列的制作提供了依据和方法。
The fabrication of microlens array based on glass was studied and three factors of glass composition,etching method and mask material that affect the fabrication were introduced.The effects of the three factors were verified by experiments.According to the analysis,microlens array that meet the claims was manufactured by using suitable material and method.This provides proof and method for the fabrication of glass microlens array.
出处
《半导体光电》
CAS
CSCD
北大核心
2011年第2期216-219,共4页
Semiconductor Optoelectronics
