基于图像的晶粒定位技术研究

Study on Image-based Grain Orientation Algorithm

对基于图像的晶粒定位技术进行了研究,提出了一种利用绘制等间隔网格线定位晶粒位置的方法。首先对获取的晶圆片图像进行阈值分割,对分割后的图像进行晶粒边缘提取,依据提取的晶粒边缘和"非共线三点确定圆"的原理计算出三个相邻但不在同一条直线上的晶粒圆心坐标,计算出绘制网格的偏移和斜率,在晶圆片上绘制等间隔网格线来定位晶粒形心位置和晶粒缺失位置,精确控制微小芯片贴装过程中晶粒的拾起。实验结果表明,该方法能精确地识别出图像中的晶粒形心位置和晶粒缺失位置。

Based on the study of image-based grain location technology,a method for orientating grains by drawing spaced grid lines.In this method,first the wafer images are segmented with thresholds,and the grain edge of the segmented images are extracted.And then three center coordinates of the grains that are adjacent but not in the same line can be calculated based on the principle of grain edge extraction and the determination of a circle by three non-collinear points.The offset and the slope of the drawing grid will be calculated,and by drawing spaced grid lines on a wafer,the heart-shaped grains and the grain loss can be located,which will precisely control the grain pickup in the placement of tiny chip.The results show that this method can accurately identify the location of the heart-shaped grains and the grain loss.