5Polster S, Kniprath R. Method for producing e. g. thin-film solar cell assembly,involves performing patterning process with re- spect to trenches such that edge region of conductive layer is melted at trench to separate contact of trench and conductive layer:DE 102011079032-AlEPh. 2011-07-12.
6Meng M M,Wan L,Zou P. l-J]. Applied Surface Science,2013 273..613-616.
7Lee K E, Cecile C, George P D. [J]. Jounal of Materials Re search, 2013,28(3) : 480-487.
8Lee Y I,Kim S,Jung S B,et al. l-J]. Applied Materials :- Inter faces,2013,5(13) :5908-5913.
9Vaseem M,Lee K M,Hong A R,et al. [J]. Applied Materials Interfaces, 2012,4(6) :3300-3307.
10Xue F L,Liu Z C,Su Y,et al. [J]. Microelectronic Engineering, 2006,83(3) :298-302.
