光盘表面结构的软模板复制及图案化氧化锌薄膜的纳米压印制备

Duplication of surface structure of compact disk by soft template and fabrication of surface-patterned ZnO films by nanoimprint technique

模板的制备和选择在纳米压印技术中非常重要.采用廉价的光盘为模板,利用聚二甲基硅氧烷(PDMS)浇铸到光盘表面,分离后复制得到光盘的负形结构.采用纳米压印技术,以PDMS软模板作为印章对氧化锌纳米溶胶进行直接压印,实现了氧化锌薄膜的表面图案化,经煅烧后得到晶态氧化锌薄膜.

The fabrication of nanoimprint templates and choice of suitable resistance layers are important in the nanoimprint lithography technique. This paper proposed that polydimethylsiloxane was used to duplicate the surface structure of compact disk by casting method, and it could be used as nanoimprint stamp. Zinc oxide sol was used as resistance layers in the nanoimprint process. Finally, surface-patterned zinc oxide films were fabricated with surface structure of compact disk by nanoimprint process.