摘要
采用磁控溅射方法在40Gr不锈钢基体上,沉积了TiN及TiWN单层薄膜、TiN/MoS2及Ti-WN/MoS2双层薄膜,对比分析了薄膜的成分、相结构、微观形貌及摩擦学性能。结果表明:根据W含量的不同,TiWN薄膜中,Ti0.67W0.33N膜层具有较高的硬度和弹性模量;TiWN/MoS2薄膜中,TiWN层主要含有TiN和WN相,MoS2层含有MoS2和MoO3相;与TiN/MoS2薄膜比较,TiWN/MoS2薄膜具有更优异的减摩、耐磨性能,可减小材料的磨损,延长其使用寿命。
TiWN/MoS2 multilayer coating and TiN/MoS2 coating were successfully deposited by magnetron sputtering on 40Gr steel. The film composition, phase structure, microstructure and tribological performance were compared and analyzed. The results show that for TiWN film, according to the different W content, Ti0.67W0.03N film has higher hardness and elastic modulus; For TiWN/MoS2 film, TiWN layer mainly contains TiN and WN phase, MoS2 layer con-tains MoS2 and MoO3 phase; Compared TiN/MoS2 film, TiWN/MoS2 film has more excellent friction reduction, wear resistance, can reduce the wear and prolong its service life.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2011年第3期48-51,56,共5页
Surface Technology
