Gauss权重法求解半导体电磁测量中的一个对偶积分方程组

The Solution of a Dual Integral Equation System with the Method of Gaussian Integration

对一个半导体电磁测量中的对偶积分方程组运用Ｓｃｈｌｏｍ ｉｌｃｈ 定理及适当积分变换，使其降维和退耦．首次设计振荡集中抑制法导出该积分核的快收敛表式，从而成功地实现Ｇａｕｓｓ 权重法对积分方程的快速精密求解，并获得了校正曲线的精密计算．

A dual integral equation system was decoupled and its dimensions were reduced by means of integral transformations and Schlmilch theorem in this paper. A formula for the integral kernel was found by “depressing oscillations in a narrow interval”. Based on this formula, the high accurate solution of the integral equation was obtained by Gaussian integration method. And the correction function and curves were obtained with high accuracy. It is emphasized that Gaussian integration will be very powerful in solving integral equation if one can get a suitable formula for calculating its non elementary integral kernal.