溶胶-凝胶法制备SiO_2薄膜工艺研究

TECHNOLOGY RESEARCH ON SILICA FILM PREPARATION BY Sol-gel METHOD

以正硅酸乙酯为前驱体,以溶胶-凝胶法制备SiO2溶胶并且采用提拉法在玻璃基片上制备二氧化硅薄膜。研究了反应过程中反应温度、反应时间、催化剂、乙醇和水的加入量对溶胶性质和成膜性能的影响,研究了提拉速度和焙烧温度对二氧化硅薄膜润湿性能的影响。实验结果表明,适宜的反应条件为:反应物的摩尔比TEOS∶EtOH∶H2O=1∶1.5∶1.0,反应温度70℃,pH=3,反应时间1h,薄膜适宜的焙烧温度为450℃。所制备出的二氧化硅薄膜均匀透明,润湿性能良好。

Silica sol was prepared by sol-gel method using TEOS as Precursor, The silica film was prepared on glass substrate by raising process. The effects of reaction temperature, reaction time and the addition volume of ethanol, water and catalyst on the properties of silica sol were investigated. The effects of pulling rate and roast temperature on the Wettability of silicon film were investigated. The results showed that the appropriate reaction conditions were： TEOS ： EtOH ： H2O=1 ： 1.5 ： 1.0, temperature 70℃, time 1h, pH 3, The appropriate roast temperature was 450℃. The silica film prepared has the property of Uniform and transparent and Wettability well.