提高FZ NID硅成品率

Improving Percentage of Finished Product of FZ NTD Silicon

本文根据中子嬗变掺杂的原理、工艺,着重分析了影响NTD硅成品率的因素:命中率及断面均匀性.通过采用换位法、旋转辐照工艺,较大幅度地提高了NTD硅单晶的命中率、断面均匀性及成品率.

In this article according to theory and technology of neutron transmutation doping, the factors (hitting percentage and cross section uniformity) which influence the percentage of finished product of FZ NTD silicon are analysed. Using the technology of exchanging position and revolving silicon for irradiation, the hitting percentage and cross section uniformity and percentage of finished product of NTD silicon single crystal are improved in higher extent.