二元光栅衍射特性的矢量理论分析

The Vector Theory Analysis of Binary Gratings Diffraction Characteristics

根据麦克斯韦基本方程组，推导了描述二元光栅衍射特性的矢量理论分析方法——严格的耦合波方法，给出了ＴＥ、ＴＭ 两种偏振模式入射下的耦合波方程。应用该方法对二元位相光栅的衍射特性进行了分析，验证了该方法的收敛性及准确性。讨论了光栅周期、光栅深度、入射波入射角度等参数对光栅衍射特性的影响。

Based on the Maxwell equation and the boundary continuity of electromagnetic field ,the vector theory analysis method the rigorous coupled wave analysis technique for describing the diffraction of electromagnetic waves by binary gratings for both TE and TM polarization is presented. By using the rigorous coupled wave theory the diffraction characteristics of the binary phase gratings are analyzed.. The examples demonstrate the accuracy and the stability of the rigorous coupled wave method. The effects of grating period, the grating depth ,and incident angle on the grating diffraction characteristics are investigated.