光电内窥参数检测装置

The Equipment for Optoelectronic Spy System for Quantitative Testing

报导一种新的光电内窥参数测量装置。将一半导体激光器发出的光束经柱面镜汇聚成一细线，通过特殊设计的折反棱镜将其沿轴线方向投影到管孔内壁，得到管孔内壁的光截轮廓，该轮廓经物镜成像到ＣＣＤ光敏面，通过图像卡采集到计算机。在计算机图像测量及辅助提示下，完成参数测量。此外，该装置还可在测量显微镜横向移动导轨及读数手轮的配合下测量内孔中径。实验结果表明轴向测量的重复精度为±１７μｍ ；中径测量的重复精度为±１２μｍ 。它在工业制造领域内具有广阔的应用前景。

A novel equipment for spy quantitative testing is presented in this paper. A light beam from a semiconductor laser diode converges into a line shape by a cylindrical lens, projected onto the inner surface in a parallel direction with the pipe axis, and the information to be detected can be got from the deformed line. A special compact reflected refracted prism group is designed for small pipes, ensuring that the line shape light beam can be projected and then the deformed line can be imaged by a CCD camera. The image is captured into a computer by a 512×512 pixels image card for further processing, but without losing or changing any useful geometrical feature. The parameters such as pitch and depth can be measured on the monitor screen aided by the computer. The pipe diameter can also be measured by moving the stage along the pipe radius until the opposite inner surface is exactly illuminated and focused by the CCD objective lens. The experiment results show that the accuracy of ±17μm of pitch measurement, ±12μm of diameter measurement has been achieved, and it has a good future to application in industry.