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微型薄膜集成氢气敏感器件的研制 被引量：3

Research of Micro-film Hydrogen Sensor with Integrated
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摘要 采用将类光激发二极管（即N-Si/Thin-SiO2/Thin-Ta/PdCr/Pt结构）、PdCr合金薄膜电阻、Pt加热和感温双电阻温控系统等集成的方式,研制了微型薄膜集成氢气敏感器件,能稳定测量0~2%体积分数的氢气,且具有较快的响应和恢复时间。 Applying class light excitation diodes（N-Si/Thin-SiO2/ Thin-Ta/PdCr/Pt）,thin-film PdCr alloy resistors and temperature control system with Pt heating and pt temperature pairs of resistance by an integrated approach,Micro-film hydrogen sensor with integrated has been developed with fast response and recovery time and stable sensitivity in range of 0~2% hydrogen concentration.
作者 谢贵久 刘利民 何迎辉 贾京英 景涛
机构地区 中国电子科技集团公司第四十八研究所
出处 《微处理机》 2011年第2期17-19,共3页 Microprocessors
关键词 氢气氢敏 薄膜 PdCr合金 PT 二极管 电阻 溅射 Hydrogen Hydrogen-sensitive Thin film PdCr alloy Platinum Diode Resistor Sputtering
分类号 TP212 [自动化与计算机技术—检测技术与自动化装置]
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参考文献10

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微处理机
2011年 第2期

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