摘要
介绍了加速度计的发展概况,综述了硅电容、硅压阻、压电、厚膜应变、力平衡、电子隧道和热传导加速度计的结构、原理和发展趋势.
The developing survey of the accelerometers is introduced. The structures, principles and developing trend of various types of accelerometers, i.e. silica capacitance, silica resistance, piezoresistance, thick film strain, force balance and electronic tunnel as well as heat conductance accelerometers, are described comprehensively.
出处
《自动化仪表》
CAS
北大核心
1999年第9期1-5,16,共6页
Process Automation Instrumentation
关键词
加速度计
发展概况
型式
结构
Accelerometer Developing survey Principle Type Structure
