芯片级全固化集成光波导陀螺

All-solid integrated optical waveguide Gyro based on chip

高灵敏、全固态、集成制造的微光-机-电陀螺是未来发展的新一代惯性器件,在深空探测、载人航天以及飞行器制导技术领域具有迫切应用需求。提出基于光波导微腔透射谱输出特性的惯性测量方法与系统基础结构,并对其惯性测量原理、微加工工艺以及耦合性能进行了讨论。利用数值拟合得到波导耦合系统设计优化参数,采用激光熔融热处理技术,降低了波导表面粗糙度,测试获得品质因数约为108的高Q值微腔,为芯片级全固化集成光波导陀螺的制造奠定了基础。

MOEMS gyroscope with high sensitivity,all solid-state and integrated manufacturing is a new generation of inertia device in the future development.It is urgent in deep space exploration,manned spacecrsft and guidance technology of spacecraft.In this paper,inertial measurement method and system infrastructure were proposed which were based on the output characteristics of transmission spectra of optical waveguide micro-cavity.And the inertial measurement principle,micro-processing technology as well as the coupling properties were discussed.Design parameters of waveguide coupling system were obtained and optimized by use of numerical fitting.Roughness on the waveguide was reduced by the technology of laser melting and heat treatment.Up to 108 of the quality factor of the micro-cavity was obtained in the test.It lays the foundation for manufacturing of integrated optical waveguide gyro with chip-scale and all-solid.