水浴沉积法制备太阳能电池用CdS薄膜

Bath Deposition of CdS Thin Film for Solar Cells

本文用化学沉积法和电化学沉积法制备太阳能电池用半导体薄膜硫化镉（ＣｄＳ），对成膜的影响因素进行了测试。结果表明，化学沉积ＣｄＳ质量较好，沉积速度较慢，受ｐＨ的影响较大，且水浴容器壁上沉积有大量的ＣｄＳ膜。电化学沉积ＣｄＳ的电流密度在０．５～２．５ ｍ Ａ／ｃｍ ２ 的范围内，沉积速度快，材料消耗少，但是对电流密度过于敏感，成膜参数难以控制。

The Paper investigates chemical bath deposition and electrochemical deposition of CdS thin film for solar cells,and the influence factors on film growing.Result shows that chemical bath deposited CdS thin film has favorable quality,but depositing rate is low,influence of pH on depositing rate is strong,and there is deposition of CdS film on the bath container.Electrochemical deposition of CdS film is prepared with current density of 0.5～2.5 mA/cm 2,depositing rate is high,and material lost low.The influence of current density is great,parameters of film growing are difficult to Control.