真空比对法校准装置的研究

A system for vacuum gauge calibration using the comparison technique

真空比对法校准装置采用了动态直接比对法、静态直接比对法和静态膨胀法,在一台装置上复合了三种方法,满足了拓宽量程的需求。该装置可以1×105~5×10-4 Pa范围内的各类真空规进行校准,是一种结构简单、操作方便、检定效率高、实用性强的真空标准装置。整套装置由涡轮分子泵、校准容器、副标准真空计和金属膨胀阀等部件组成,主要技术指标符合国际标准化组织和国内有关真空标准的规定。

Integrating the methods of dynamic direct comparison with static direct comparison and static expansion into one,a contrast-based vacuum calibration system was provided,by which the calibration range could be widened from 1×105Pa to 5×10-4Pa for various vacuum gauges.The charateristics of the vacuum calibration system include simple construction,easy to operate and high efficiency/practicability.It is mainly composed of a turbo-molecular pump,container for calibration,auxiliary standard vacuum gauge and metal valves,and its basic technological indices come up to both ISO and domestic standards relevant to vacuum.