旋转对称电子光学系统的五级几何像差分析

Analyses of Fifth Order Aberrations of Rotationally Symmetric Electron Optical System

本文将旋转对称电子光学系统五级几何像差按边界条件分成球差、彗差、亚像散和场曲、亚彗差、像散和场曲、畸变等六类，并分析各类像差在高斯像平面上的图像．

Fifth order geometrical aberrations of rotationally symmetric electron optical system are divided into six types according to boundary condition.They are spherical aberration,coma,sub field curvature and astigmatism,sub coma,field curvature and astigmatism and distortion.Analyses for every type's scattering pattern in Gaussian image plane are also given in detail.