DW DM窄带滤光片用高精度光学膜厚仪

Hi-precision Optical Thickness Monitor Applied to Manufacture of Ultra Narrow Band Pass Filter

随着信息技术的发展对高密度波分复用（ＤＷＤＭ）滤光片的需要越来越大。而高精度高性能的光学薄膜膜厚监控系统是制备ＤＷＤＭ 滤光片的关键。文中论述了所建立的制备用于１００ＧＨｚ～５０ＧＨｚ ＤＷＤＭ 滤光片的高精度高性能的光学薄膜膜厚监控系统。该系统的波长分辨力为０．１ｎｍ ，重复性精度为±０．０５ｎｍ 。信噪比与温度漂移特性分别为±０．０１％ 和０．０５％ ／ｈ。还论述了该系统的实际实验结果。

With the rapid increase in DWDM(Dense Wavelength Division Multiplexing) filter demand,a high precision and high performance optical monitor is a key component to monitoring the optical thickness when depositing the DWDM filter.As a target for manufacture of 100GHz and even 50GHz,the high precision and high performance optical monitor have been developed.It shows that the resolution and repeatability are better than 0.1nm and ±0.05nm,respectively,and the S/N and temperature drift are less than ±0.01% and 0.05%/h,respectively.The results of experiment and measurement are investigated and discussed in this article.