摘要
介绍了带宽系列为30~40nm 的硬膜矩形化带通滤光片的设计和制造方法。采用七半波膜系以获得矩形化程度较高的通带波形和深度的背景抑制特性(OD5~OD6),结合工艺特性和允差模拟分析对膜系进行优化设计。采用光学过正极值法监控膜厚,采用非球面夹具解决膜厚均匀性问题。
The design and manufacture of the hard coated rectangular bandshapes filters with bandwidth of 30nm to 40nm is described. Optimized 7 cavity bandpass filters is required to offer very steep sided passbands and deep blocking (OD5~OD6) closer to the passband. An overshut turningpoint monitoring method is used in production of filters and it is possible to improve the layer uniformity by the use of a non spherical surface substrate carrier.
出处
《光学仪器》
1999年第4期137-140,共4页
Optical Instruments
关键词
硬膜
矩形带通
通带邻域背景
波形系数
滤光片
Hard coated,Rectangular Bandshpaes,Blocking Closer to the Passband,Bandshpes.