掺杂LaF_3∶Er,Yb纳米颗粒的有机无机复合型平面光波导放大器的制备及增益测试

Fabrication and Gain Measure of LaF_3∶Er,Yb Doped Organic-inorganic Waveguide Amplifier

采用油酸修饰的铒镱共掺氟化镧纳米颗粒掺杂的有机-无机杂化材料做为光波导放大器的有源层,同时采用光学性质良好的甲基丙烯酸甲酯-甲基丙烯酸环氧丙酯共聚物制作光波导的上下包层,首先说明了芯层材料不能刻蚀制备传统矩形波导的原因,其次设计了一种倒脊结构的平面光波导放大器,并采用蒸镀铝掩膜、紫外光刻和反应离子刻蚀等工艺,制备出放大器的样品,同时对样品端面进行了化学机械抛光处理,在信号光(1 550 nm)功率为1 mW的条件下,在1.9 cm长度的波导上获得了3.2 dB的相对增益.

Oleic acid modified LaF3∶Er,Yb nanoparticles were prepared and doped in organic-inorganic hybrid material as the active layer of waveguide amplifier.Polymethyl-methacylate-glyciclyl-methacrylate,an excellent and transparent optical polymer material,was used as the top and bottom layers.During the process of waveguide fabrication,the reason why active layer cannot be etched were instructed.And an embedded ridge structure waveguide amplifier was also designed.The device was fabricated by aluminium mask vacuum evaporation,UV lithography and reactive ion etching method（RIE） process.Waveguide end-faces were polished in order to get high gain.At last,a 3.2 dB relative gain was obtained in a 1.9 cm length sample（signal power was 1mw and pump power was 188 mW）.