摘要
Mo thin fihns are deposited on soda lime glass （SLG） substrates using DC magnetron sputtering. The Mo film thicknesses are varied from 0.08 μm to 1.5μm to gain a better understanding of the growth process of the film. The residual stresses and the structural properties of these films are investigated, with attention paid particularly to the film thickness dependence of these properties. Residual stress decreases and yields a typical tensile-to-compressive stress transition with the increase of film thickness at the first stages of fihn growth. The stress tends to be stable with the further increase of film thickness. Using the Mo film with an optimum thickness of 1μm as the back contact, the Cu（InGa）Se2 solar cell can reach a conversion efficiency of 13.15%.
Mo thin fihns are deposited on soda lime glass （SLG） substrates using DC magnetron sputtering. The Mo film thicknesses are varied from 0.08 μm to 1.5μm to gain a better understanding of the growth process of the film. The residual stresses and the structural properties of these films are investigated, with attention paid particularly to the film thickness dependence of these properties. Residual stress decreases and yields a typical tensile-to-compressive stress transition with the increase of film thickness at the first stages of fihn growth. The stress tends to be stable with the further increase of film thickness. Using the Mo film with an optimum thickness of 1μm as the back contact, the Cu（InGa）Se2 solar cell can reach a conversion efficiency of 13.15%.
