周期栅格结构表面的零反射现象

Zero-reflectance at Surface of Periodic Grating Structures

为研究周期微栅格对材料法向反射特性的影响规律,利用时域有限差分(FDTD)方法计算周期在6～14μm之间的一维硅栅格结构的光谱法向反射率,通过选择合适的栅格轮廓和参数,在不同波长位置实现零反射现象.在此基础上分析三角形栅格的深度H和刻蚀宽度L对其光谱法向反射率的影响,发现在3.23μm和8.7μm附近实现零反射现象的最佳栅格参数.

Periodic gratings with different shapes are designed to study spectral reflectivity in normal direction using finite-difference time-domain method.It shows that very low reflectivity in wavelengths can be found with proper grating structures and even zero-reflectance can be found.Influences of depth and slot width of triangle gratings on reflectance are investigated.Parameters for a triangle grating with very low reflectivity in wave bands of 2.75-3.23 μm and 3.84-4.88 μm are found.