喷淋式MOCVD反应器的传质分析及结构设计

Mass Transport Analysis and Structure Design of Showerhead MOCVD Reactor

对喷淋式MOCVD反应器中的传质过程进行了数理分析,并提出了该类型反应器的结构设计原则.数理分析显示,基片上方各点的轴向速度仅是垂直距离的函数,与径向距离无关;顶壁高度对反应室内的传质有重要影响.设计喷淋式反应器结构时,应重点考虑顶壁高度和反应室半径的选取、基片加热方式以及喷淋头结构的柔性设计.

The mass transport process in showerhead MOCVD reactor was mathematically analyzed,and the design principles of the reactor were suggested.The mathematical analysis showed that,the vertical component velocity of a point over the substrate was only dependent of vertical distance and independent of radial distance.The ceiling height of the reactor had important effects on the mass transport process.When designing a MOCVD showerhead reactor,more attention should be paid to ceiling height,chamber radius,heating method of the substrate and flexibility of showerhead structure.