脉冲激光烧蚀金属Cu产生电子和离子发射研究

Electron and Positive Ion Emission Produced by Pulsed Nd∶YAG Laser Ablation of Metal Cu

通过对脉冲ＮｄｖＹＡＧ激光烧蚀金属Ｃｕ 过程中的烧蚀靶和收集板上电压信号的时间分辨测量，研究了激光烧蚀金属Ｃｕ产生电子和离子发射过程及其受缓冲气压的影响。实验结果表明：在激光烧蚀过程中，烧蚀靶上产生离子和高能电子，高能电子较离子率先从靶面出射；随着烧蚀环境气压的升高。

By time resolved measurement of potential current in ablation target and collector the emission characters of electrons and ions produced by pulsed Nd∶YAG laser ablation of metal Cu and the change of meaurements with ablation gas pressure are investigated. The results show that when the metal is ablated by laser electrons and ions are produced in ablation target and electrons with high kinetic energies are emitted first.With a rise in pressure,the charge in ablation target and collector produced by laser ablation is decreased rapidly.