偏振态脉冲激光辐射的微孔加工

Microhole Drilling with Polarized Pulse Laser Radiation

文中讨论了偏振态脉冲激光辐射微孔加工的一些实验。首次发现了偏振态激光打孔具有的独特优势—良好圆度、边缘光洁整体和较高的重复性；分析了其原因，同时对偏振态脉冲激光辐射影响微孔质量（孔形、孔深、锥度、入口孔径、出口孔径）的一些因素，如泵浦能量、光阑的选择及其大小，光学系统的焦距等也作了较为详细的研究和测试。

Some tests on microhole drilling with polarized pulse laser radiation were discussed.Some factors which affect on microhole quality (i.e.hole shape,depth,conical degree,entrance diameter and exit diameter) in polarized pulse laser drilling were studied and measured in detail,such as pumping energy,aperture selection and its size,the focal length of optical system etc.Some experimental data as well as very good circularity and consistent microhole have been obtained.The superiority of polarized pulse laser drilling is showed finally.