摘要
采用电镀铜箔蚀刻法和图形电镀反贴法，研究了雷达罩曲面ＦＳＳ阵图形制作工艺，解决了液态光抗蚀油墨的立体涂布、底片分割贴装、旋转狭缝曝光及蚀刻问题；另外还解决了图形电镀、压模反贴问题。图形精度分别达到±０ ．０８ ｍｍ 和±０ ．０６ ｍｍ ，满足≤±０ ．１０ ｍｍ 的图形公差要求。
Mainly using the technology method of electroplating copper-etching and figure electroplating-opposite mounting,study the preparation for FSS array camber figure in the radar shade,and resolve several key problems of three-dimensional painting process of liquid photo sensitive resist etching ink,negative mount,sensitizing through rotating narrow seam and etching,as well as figure electrolating,mould pressing-opposite mounting.The precision of the figure is up to ±0.08 mm and ±0.06 mm,meet manufacturing tolerance requirement of ±0.10 mm.
出处
《电子工艺技术》
1999年第6期224-227,共4页
Electronics Process Technology
关键词
FSS雷达罩
图形蚀刻
图形电镀反贴
FSS array radar shade
Etching
Figure electroplating-opposite mounting
