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Parylene涂覆材料及其应用 被引量：7

Parylene Coating Material and Its Application
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摘要 介绍了一种热塑性高分子材料派瑞林(Parylene)。首先介绍了不同型号材料的分子结构和Parylene的涂覆过程;接着对其特性进行了较全面阐述,该材料具有良好的物理和机械性能,具有低摩擦系数、优良的耐溶剂性能和耐酸碱特性等突出特点,并将其综合性能和其他常用涂层性能进行了比较。介绍了Parylene涂层在MEMS领域、电子行业、医疗器械以及文物保护方面的应用,及其在微电子领域的应用前景。 A thermoplastic macromolecule material Parylene was introduced.Firstly,the molecular structures for the different type materials and the process of coating are introduced.Then,its characteristics are expatiated.It has good characteristics in physical and mechanism,such as small coefficient of friction,fine performance in resist solvent,acid and alkali etc.The general performances are compared with those of other coating materials in common use.The applications of the Parylene in MEMS field,electronic industry,medical instrument and protection of cultural relics are introduced.Its application prospect in the microelectronic field is presented.
作者 韩建栋 徐爱东
机构地区 中国电子科技集团公司第十三研究所
出处 《半导体技术》 CAS CSCD 北大核心 2011年第6期430-433,共4页 Semiconductor Technology
关键词 派瑞林 摩擦系数 微电子机械系统 气相沉积 涂覆材料 Parylene friction coefficient MEMS vapour phase deposition coating material
分类号 TM215.1 [一般工业技术—材料科学与工程] TH703 [机械工程—精密仪器及机械]
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半导体技术
2011年 第6期

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