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数字式测高仪的动态特性测试分析

Testing and Analysis of Dynamic Characteristics of Digital Height Measuring Instrument
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摘要 数字式测高仪的测量速度、定位精度和测量力是表征其动态特性的3个主要方面.为此,论述了它们的具体测量方法,以某数字式测高仪为对象,采用微平面镜激光干涉仪、精密测力计等器具进行动态特性测试,给出了测试结果,分析了误差来源及其变化规律,其中,对测高仪定位误差的测试与分析是新的尝试.测试结论对改进测高仪的设计、提高测量精度具有实际价值. Measuring speed,position accuracy and stylus force are three main dynamic characters of digital height measuring instrument（DHMI）.Test methods of the three important characters are discussed.And some measuring instruments such as a miniature plane-mirror interferometer and a precise forcemeter are employed for testing these characters.Testing results are presented and the sources and regularity of dynamic errors are analyzed.It is innovative to test and analyze the position accuracy of DHMI.These important test data and conclusions can be utilized to improve the measuring accuracy of DHMI.
作者 卢继敏 林虎 陈洪芳 殷建杰
机构地区 贵阳新天光电科技有限公司 北京工业大学机械工程与应用电子技术学院
出处 《北京工业大学学报》 EI CAS CSCD 北大核心 2011年第6期801-805,共5页 Journal of Beijing University of Technology
基金 国家自然科学基金资助项目(50627501)
关键词 测高仪 动态响应 定位误差 测量力 digital height measuring instrument dynamic response positioning error stylus force
分类号 TH711 [机械工程—测试计量技术及仪器]
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参考文献8

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共引文献21

北京工业大学学报
2011年 第6期

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