X光多层膜反射镜的损伤与破坏实验研究

EXPERIMENTAL STUDY OF DAMAGE AND DESTROY OF X-RAY MULTI-LAYER REFLECTOR

产生 Ｘ 光激光的等离子体环境对 Ｘ 光多层膜反射镜造成损伤与破坏。通过模拟实验，给出国产 Ｍｏ／ Ｓｉ多层膜反射镜的破坏阈值大约是 ０１０ Ｊ／ｃｍ ２，在这个辐照剂量下，多层膜表面均方粗糙度明显增加，反射率几乎降至为零。提出了防止多层膜反射镜破坏的一些想法。

The plasma environment which creates X-ray laser brings the difficulty to the application of X-ray multi-layer reflector. The most difficult is that the X-ray emitted by the plasma destroys and damages the multi-layer reflector. It is shown by the simulated test that the damaged threshold of Mo/Si multilayer reflector made in china is less than 0.10J/cm 2. With he exposure the radiation dose the rood-mean square roughness of multi-layer apparently increases and the reflectivity almost drops to zero. According to these results, the article state some ideas for preventing damages of the multi-layer reflector.