摘要
介绍了辉光放电光谱技术的原理及与其它表面分析技术的比较.用此技术成功快速地测得氮化表层的稀土和氮、碳、氧沿氮化层的分布,并由此推出化合物层深.
The principle of glow discharge optical emission spectrometry was introduced in this paper, and was compared with other surface analysis techniques. The distribution of rare earth, nitrogen, carbon, oxygen and other elements along the nitride layer were measured by GDOES. The depth of compound layer could be estimat-ed.
出处
《理化检验（物理分册）》
CAS
1999年第11期499-500,共2页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
